| 000 | 00384pam a2200157a 44500 | ||
|---|---|---|---|
| 008 | 230515b2005 xxu||||| |||| 00| 0 eng d | ||
| 020 | _aNULL | ||
| 041 | _aENGLISH | ||
| 082 | _aN.D. | ||
| 100 | _aCampbell S.A | ||
| 245 | _aThe Science & Engineering Of Microelectronics Fabrication | ||
| 250 | _a0 | ||
| 260 |
_aNULL _bOxford Uni. Press _c2005 |
||
| 300 | _a603 | ||
| 650 | _aNULL | ||
| 999 |
_c589728 _d589728 |
||