TY  - BOOK
AU  - TAI-RAN HSU
AU  - TAI-RAN HSU
TI  - MEMS AND MICROSYSTEMS DESIGN MANUFACTUREAND NANOSCALE ENGINEERING
U1  - 621.381/TAI 
PY  - 2008///
PB  - JOHN WILEY
KW  - MEMS AND MICROSYSTEMS DESIGN MANUFACTUREAND NANOSCALE ENGINEERING
ER  -