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| 100 | _aTAI-RAN HSU | ||
| 245 | _aMEMS AND MICROSYSTEMS DESIGN MANUFACTUREAND NANOSCALE ENGINEERING | ||
| 250 | _a1ST | ||
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_bJOHN WILEY _c2008 |
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| 650 | _aMEMS AND MICROSYSTEMS DESIGN MANUFACTUREAND NANOSCALE ENGINEERING | ||
| 700 | _aTAI-RAN HSU | ||
| 942 | _cBK | ||
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