000 00252nam a2200097Ia 4500
008 230508s2010 xx 000 0 und d
041 _aeng
100 _aTAI.RANHSU
245 _aMEMS & MICROSYSTEM DESIGN & MANUFATURE
260 _bTATA MC GRAW HILL
_c2010
999 _c334127
_d334127